CASE STUDIES

Entegris' Advanced, Next generation reticle SMIF pod
Entegris, partnering with Unidym — a leading innovator of carbon nanotube technology, now offers an advanced, next generation reticle SMIF pod that is fully compatible with all Single Reticle Pod (SRP) applications, including those applications with pods designed for specific needs. The new pod addresses the requirement for dramatically improved reticle safety and protection against harmful contaminants.

Entegris has been on the forefront of developing new applications incorporating superior grade carbon nanotubes (CNTs) from Unidym. The unique qualities of these CNT composites have shown strong promise in wafer and disc handling products. CNT reinforced composites are several times tougher, stronger, stiffer, lighter, and more wear resistant than any other composite on the market.

Entegris wafer handling products are the de facto standard for protecting and transporting wafers within the fab environment. They supply such products to every major fab in the world.

This new reticle pod was designed from the ground up to positively impact fab productivity and reduce costs. The pod achieves this by offering many advantages in a simple, yet reliable design.

Features:

• Complete compatibility and interoperability with all SRP applications ¡V no changes to existing tool setups are needed
• Advanced reticle retainer system (patent pending) provides reduced particle generation, ESD path to ground
• Simplified snap fit construction improves reliability
• No metal components means no reticle scratching, no metal contamination, less maintenance
• ESD safe perimeter door seal reduces field-induced charge potential while providing a sealed environment
• Through-hole filtering eliminates internal vacuum potential and provides a clean path for pressure equalization
• Designed to be cleaned and dried in automated tools, reducing operator involvement

Entegris is a materials integrity management leader in high technology
Entegris products purify, protect, and transport critical materials within diverse industries such as semiconductor, data storage, chemical processing and fuel cell. Entegris continues to develop leading edge technologies with the use of carbon nanotubes in these diverse areas.

Carbon nanotubes showed exceptional promise in:

• Mechanical and load-bearing components
• Wear surfaces
• ESD-safe housings

Entegris is exploring and developing other uses of carbon nanotubes/polymer conductive composites. These amazing composite show exceptional future promise in:

• Flexible products
• Low permeation applications
• Membranes
• Purification products
• Fuel Cells products

About Entegris
Entegris is the global leader in materials integrity management, delivering a wide range of products for purifying, protecting and transporting critical materials used in processing and manufacturing in semiconductor and other high tech industries. Entegris is ISO 9001 certified and has manufacturing, customer service and/or research facilities in the United States, China, France, Germany, Japan, Malaysia, Singapore, South Korea and Taiwan. Additional information can be found at www.entegris.com